Micro-fabrication of ceramics: Additive manufacturing and conventional technologies

Abstract Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such high-temperature resistance, high wear low density, and favourable mechanical chemical properties at elevated temperature. However, with the emerging of additive manufacturing, use ceramics for functional structural MEMS raises new opportunities challenges. This paper provides an extensive review manufacturing processes ceramic-based MEMS, including conventional technologies. The covers micro-fabrication techniques focus on their operating principles, main features, processed materials. Challenges that need to be addressed applying technologies include ceramic printing wafers, post-processing micro-level, resolution, quality control. also sheds light possibilities potential applications, which indicates a promising future.